残余气体分析仪
产品名称:残余气体分析仪
产品型号: RGA100/RGA200/RGA300
产品品牌: SRS
残余气体分析仪(RGA)划分为RGA100、RGA200、RGA300amu三种型号,其优异的性能和价值是真空分析仪的领先产品。并且SRS提供的残余气体分析仪的价格不到同类产品的一半,每一个RGA系统都由一个四级杆探针和电子控制单元组成。实时分析的windows软件包可以更方便的用于数据采集和分析,并可进行远程控制。

具体参数:

质谱范围                      RGA100     1 to 100 amu
                                        RGA200     1 to 200 amu
                                        RGA300     1 to 300 amu
质朴滤波器类型           Quadrupole
探测器类型                   Faraday cup (FC), standard Electron multiplier (EM), optional
分辨率                           Better than 0.5 amu @ 10 % peak height. Adjustable to constant peak  width
                                       throughout the mass range.
灵敏度(A/Torr)              2 × 10−4 (FC), <200 (EM).
探测极限                       5 × 10−11 Torr (FC),
                                       5 × 10−14 Torr (EM)
测试范围                      10−4 Torr to UHV (FC)
                                      10−6 Torr to UHV (EM)
操作温度                      70 °C (max.)
烘烤温度                      300 °C (without ECU)
离子发生器
结构                              Open ion source, cylindrical symmetry, electron impact ionization
材料                              SS304 construction
灯丝                              Thoriated iridium (dual) with firmware protection. Built-in 1 to 10 W degas ramp-up.
                                      Field replaceable.
电子能量                      25 to 105 V, programmable
离子能量                      8 or 12 V, programmable
焦点电压                      0 to 150 V, programmable
电子输出电流              0 to 3.5 mA, programmable
规格
探针尺寸                     8.75" from flange face to top of ionizer
探针孔径                     2.0"
探针安装法兰             2.75" CF
Minimum tube I.D.    1.375"
ECU尺寸                    3.1" × 4.1" × 9.1" (WHD). Easily separated from the probe for bakeout.
LED指示灯                 Power ON/OFF, filament ON/OFF,degas ON/OFF, electron multiplierON/OFF, RS- 
                                     232 Busy, Error,Overpressure, Burnt Filament
预热时间                    Mass stability ±0.1 amu after 30 minutes
电脑接口                    RS-232C, 28,800 baud with highlevel command set
软件                            Windows based application
电源要求                   24 VDC @ 2.5 amps, male DB9 connector, optional built-in power module for AC 
                                    line operation


 
残余气体分析仪具体性能参数如下:



Copyright©2013  北京市海淀区中关村大街19号15层办公B1703.京ICP备10047143号-1  |  SP DESIGN