Silicon p-n junction photodiodes (AXUV-series) have been developed by International Radiation Detectors for applications in the vacuum ultraviolet, extreme ultraviolet and the soft x-ray (XUV,wavelength range 1800 Å to 2 Å, energy range 7 eV to 6000 eV) spectral region. These diodes have zero surface recombination resulting in near theoretical quantum efficiencies for XUV photons and other low energy particles.